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Plasma Charging Damage formatIsbn:Hardcover - 9781852331443 2 Pleitgen

SKU 27688051255
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2 Pleitgen

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Plasma Charging Damage formatIsbn:Hardcover - 9781852331443 2 PleitgenIn the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. A key factor that makes these advances possible is the ability to have precise control on material properties and physical dimensions. The introduction of plasma processing in pattern transfer and in thin film deposition is a critical enabling advance among other things. In state of the art silicon Ie manufacturing process,

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