Advances in Rapid Thermal and Integrated Processing formatIsbn:Hardcover - 9780792340119 those presented at a conference
Description
those presented at a conference on probability and causation held at the University of California at Irvine on July 15-19
This book is written by an author whose knowledge of the subject is based on vast surgical experience
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Advances in Rapid Thermal and Integrated Processing formatIsbn:Hardcover - 9780792340119 those presented at a conferenceRapid thermal and integrated processing is an emerging single wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues,
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